Tantalum nitride

Tantalum nitride
Names
	Other names Tantalum mononitride
Identifiers
CAS Number	12033-62-4 ;
3D model (JSmol)	Interactive image;
ChemSpider	74745; Ta3N5: 10605738;
ECHA InfoCard	100.031.613
EC Number	234-788-4;
PubChem CID	82832;
CompTox Dashboard (EPA)	DTXSID6065183 ;
	InChI Key: MZLGASXMSKOWSE-UHFFFAOYSA-N; InChI=1S/N.Ta;
	SMILES N#[Ta];
Properties
Chemical formula	TaN
Molar mass	194.955 g/mol
Appearance	black crystals
Density	14.3 g/cm3
Melting point	3,090 °C (5,590 °F; 3,360 K)
Solubility in water	insoluble
Thermal conductivity	1100 W/(m·K) (metallic theta phase)
Structure
Crystal structure	Hexagonal, hP6
Space group	P62m, No. 189
Hazards
Flash point	Non-flammable
Related compounds
Other cations	Vanadium nitride; Niobium nitride
	Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). verify (what is ?) Infobox references

Tantalum nitride (TaN) is a chemical compound, a nitride of tantalum. There are multiple phases of compounds, stoichimetrically from Ta₂N to Ta₃N₅, including TaN.

As a thin film TaN find use as a diffusion barrier and insulating layer between copper interconnects in the back end of line of computer chips. Tantalum nitrides are also used in thin film resistors.